Micro Electro Mechanical Systems, Embedded Systems
36
Scopus Publications
630
Scholar Citations
14
Scholar h-index
18
Scholar i10-index
Scopus Publications
Simulation Study and Reliability Analysis of Low Actuation Voltage Cantilever Based RF MEMS Switch , Shivashankar A. Huddar, B. G. Sheeparmatti, , A. Y. Patil, , Nalini C. Iyer, , Raman Kumar, , Shridhar N. Mathad, and Journal of Nano and Electronic Physics, 2024 Journal of Nano- and Electronic Physics. Scientific journal. ISSN: 2077-6772. Journal abbreviation: J. Nano- Electron. Phys. No page charges. All articles are freely available on-line. Issued 4 times per year. Publisher: Sumy State University. (Sumy, Ukraine)
Multi-objective design optimization of microdisk resonator M. Sutagundar, B.G. Sheeparamatti, D.S. Jangamshetti Nanoscience and Nanotechnology Asia, 2020 Objective: This paper presents a multi-objective design optimization of MEMS disk resonator using two techniques. Methods: Determining the optimized dimensions of disk resonator for a particular resonance frequency so as to achieve higher quality factor and lower motional resistance is attempted. One technique used is constraint-based multi-objective optimization using the interior-point algorithm. The second technique is based on multi-objective genetic algorithm. Results: The algorithms are implemented using MATLAB. The two techniques of optimization are compared. Conclusion: The developed optimization methods can provide faster design optimization compared to full-wave simulators resulting in significant reduction of design time.
Fabrication and characterization of polysilicon-on-insulator (PolySOI) and a-SOI based micro piezoresistive pressure sensor for harsh environment applications B. G. Sheeparamatti, Kirankumar B. Balavalad Microsystem Technologies, 2019 Micro sensors and actuators are widely used in this era. Micro pressure sensors are required in many applications and are the first sensors fabricated using MEMS technology. The work presents the fabrication of two micro pressure sensors viz., polysilicon on insulator (PolySOI) and amorphous silicon on insulator (a-SOI). Both sensors work on the principle of piezoresistive pressure sensing. The PolySOI sensor has a configuration Si-SiO2-polysilicon and the a-SOI sensor has Si-SiO2-a-silicon. The fabricated sensors consist of polysilicon and a-silicon piezoresistors. Nano-piezoresistors are patterned on the diaphragm to enhance the sensitivity and are connected in the form of a Wheatstone bridge. Both sensors are characterized for potential and sensitivity over a pressure range of 0–1 MPa. Two sensors exhibit high sensitivity, PolySOI sensor provides the sensitivity of 14.7 mV/bar (147 mV/MPa). Polycrystalline silicon is used as it has excellent mechanical properties and is compatible with high temperature processing and interfaces very well with thermally deposited SiO2. a-SOI sensor has a sensitivity of 10.5 mV/bar (105 mV/MPa). Both sensors are fabricated using conventional MEMS technology and with a silicon wafer. The sensors fabricated are alternate to the use of SOI wafer which is expensive and hard to customize.
Sensitivity enhancement of piezoresistive pressure sensor using carbon nanotube as a piezoresistor Ajayakumar C Katageri, B G Sheeparamatti 2019 2nd International Conference on Advanced Computational and Communication Paradigms Icaccp 2019, 2019 Piezoresistive pressure sensors works on the principle of piezoresistive effect of a material to detect strain when pressure is applied. To enhance the sensitivity and linearity of the device, generally the piezoresistive materials are connected in the form of a Wheatstone bridge circuit. For the design of a proposed model, silicon material is used for diaphragm and gold for connectors and carbon nanotubes (CNT) for piezoresistors, since CNTs have a high gauge factor. The proposed pressure sensor is designed and simulated using Comsol and Coventorware, and analyzed with respect to different parameters such as maximum displacement of the membrane, change in the electrical resistance of piezoresistors, output voltage and sensitivity of the sensor. The sensitivity of the proposed sensor is 0.145mV/V/kPa.
ANN Modeling of Motional Resistance for Micro Disk Resonator Manjula A. Sutagundar, Basavaprabhu G. Sheeparamatti, Dakshayani S. Jangamshetti Deep Learning and Neural Networks Concepts Methodologies Tools and Applications, 2019 This article describes how modeling is an integral part of design and development of any system that provides the theoretical characterization of the system and helps in understanding the relations between various parameters of the system, before the system is developed. The capability of an Artificial Neural Network (ANN) to model the complex relations between a set of inputs and outputs is exploited to model the motional resistance and resonance frequency for a contour mode disk resonator. The solution was to develop a multilayer feed forward neural network. The data set required to train the ANN is obtained by developing an electrical equivalent model and through the MEMS simulation software Coventorware. The network is trained using a Levenberg Marquardt algorithm. The number of hidden layers and the number of neurons in each hidden layer is optimized using a genetic algorithm. The ANN model developed an efficient model of the motional resistance and resonance frequency of the disk resonator. The ANN output is compared with the output of an electrical equivalent model and a reported fabricated structure.
Design, Simulation Analysis of Si, SOI Carbon Nanotube (CNT) based Micro Piezoresistive Pressure Sensor for a High Tmeperature Pressure Kirankumar B. Balavalad, B. G. Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise Technology Iccsdet 2018, 2018 The paper, presents the design and analysis of micro piezoresistive pressure sensors using Si, SOI & CNT (Carbon Nanotube) for harsh environment. The sensors were analyzed for the important parameters like sensitivity and temperature sensitivity. Pressure range of 0 to 1MPa, over which the sensors behave linear is considered for analysis. Results reveal that the micro pressure sensor using CNT as piezoresistor has better sensitivity of 308.7mV/MPa (30.8mV/bar), which is better than the sensitivities obtained for silicon & SOI based sensors. CNT is considered as piezoresistor in the design of micro pressure sensor, because of its high gauge factor and an excellent piezoresistive property compared to Si & SOI based sensors. High temperature analysis, depict that CNT & SOI pressure sensors can be used for high temperature applications, with better sensitivity over a linear range.
Comparative Analysis of Diaphragm for the Design of High Sensitive Piezoresistive Pressure Sensor Ajayakumar C Katageri, B G Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise Technology Iccsdet 2018, 2018 Dimension of piezoresistor and diaphragm, placement of piezoresistors and shape of diaphragm are the factors that enhance the sensitivity of a sensor. Different shapes of diaphragms are compared and analyzed the results using analytical equations. Most normally utilized materials are silicon, silicon dioxide and polysilicon for the piezoresistors and for the diaphragms. Single crystal silicon is used for both piezoresistor and diaphragm. The proposed pressure sensor is analyzed by considering different parameters such as maximum centre deflection of the diaphragm, output voltage across the bridge, and sensitivity of the sensor. Comsol Multiphysics is employed for the simulation of proposed sensor.
Fabrication and Characterization of thin films of ZnO and MWNTs dispersed in DMF Ajayakumar C Katageri, B G Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise Technology Iccsdet 2018, 2018 Zinc Oxide thin films are deposited on the glass substrate of different concentration of zinc and their effect on the structural and morphological properties were investigated. Zinc acetate dehydrate, di-ethanolamine and ethanol were used as the precursor, stabilizer and solvent respectively. A molar ratio of 1:1 is maintained between Di-ethanolamine to Zinc acetate. XRD was used to analyze the crystal structure and orientation of the films. The patterns in the XRD show that the ZnO films were polycrystalline with wurtzite hexagonal structure. The ZnO thin film with 0.75M concentration has the better crystalanity as in intrinsic nature a constituent atoms, ions or molecules will be in definite arrangement. The surface morphology of the ZnO thin film was observed by scanning electron microscope (SEM). The SEM images show that they are homogenous, continuous and spindle like shape. Multi walled carbon nanotubes (MWCNT) thin film was deposited on a glass substrate and their effects on structural and morphological properties were investigated. MWCNT was dissolved in Di-Methyl Formamide. Using scanning electron microscope (SEM) surface morphology of MWCNT thin film was observed.
Study of pull-in voltage in MEMS actuators Prashant D. Hanasi, B. G. Sheeparamatti, B. B. Kirankumar 2014 IEEE International Conference on Smart Structures and Systems Icsss 2014, 2015
Design of MEMS based 4-bit shift register Ajayakumar. C. Katageri, B. G. Sheeparamatti, Veekshit. B. Math 2014 IEEE International Conference on Smart Structures and Systems Icsss 2014, 2015
Modeling of microcantilever based nuclear microbatteries Technical Proceedings of the 2008 Nsti Nanotechnology Conference and Trade Show Nsti Nanotech Nanotechnology 2008, 2008
A survey of MEMS used in space applications International Astronautical Federation 58th International Astronautical Congress 2007, 2007
Nanotechnology: Inspiration from nature IETE Technical Review Institution of Electronics and Telecommunication Engineers India, 2007
Simulink model for double buffering R.B. Sheeparamatti, B.G. Sheeparamatti, Manjula Bharamagoudar, Nayan Ambali IECON Proceedings Industrial Electronics Conference, 2006
Simulation of biosensor using FEM B G Sheeparamatti, M S Hebbal, R B Sheeparamatti, V B Math, J S Kadadevaramath Journal of Physics Conference Series, 2006
RECENT SCHOLAR PUBLICATIONS
Vidyunman Samparka Saadhanagalu – ವಿದ್ಯುನ್ಮಾನ ಸಂಪರ್ಕ ಸಾಧನಗಳು SA Basavaprabhu Sheeparamatti Prasaranga, Visveswaraya Technological University, Belgaum, Karnataka , 2021 2021
ANN modeling of motional resistance for micro disk resonator MA Sutagundar, BG Sheeparamatti, DS Jangamshetti Deep Learning and Neural Networks: Concepts, Methodologies, Tools, and … , 2020 2020 Citations: 4
Fabrication and characterization of polysilicon-on-insulator (PolySOI) and a-SOI based micro piezoresistive pressure sensor for harsh environment applications BG Sheeparamatti, KB Balavalad Microsystem Technologies 25 (11), 4119-4133 , 2019 2019 Citations: 26
Sensitivity enhancement of piezoresistive pressure sensor using carbon nanotube as a piezoresistor AC Katageri, BG Sheeparamatti 2019 Second International Conference on Advanced Computational and … , 2019 2019 Citations: 7
Fabrication and Characterization of thin films of ZnO and MWNTs dispersed in DMF AC Katageri, BG Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise … , 2018 2018 Citations: 1
Design, simulation & analysis of Si, SOI & carbon nanotube (CNT) based micro piezoresistive pressure sensor for a high tmeperature & pressure KB Balavalad, BG Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise … , 2018 2018 Citations: 6
Comparative Analysis of Diaphragm for the Design of High Sensitive Piezoresistive Pressure Sensor AC Katageri, BG Sheeparamatti 2018 International Conference on Circuits and Systems in Digital Enterprise … , 2018 2018 Citations: 4
Dynamic Analysis of Micro-cantilever with a feedback circuit MN Patil, MN Eshwarappa, BG Sheeparamatti 2018 International Conference on Smart Systems and Inventive Technology … , 2018 2018
Design Optimization of Microdisk Resonator Using Interior Point Algorithm M Sutagundar, BG Sheeparamatti, DS Jangamshetti 2018 IEEE Electron Devices Kolkata Conference (EDKCON), 1-4 , 2018 2018 Citations: 1
Design, simulation & analysis of SOI based micro piezoresistive pressure sensor for high temperature applications KB Balavalad, BG Sheeparamatti 2018 3rd IEEE International Conference on Recent Trends in Electronics … , 2018 2018 Citations: 9
Retraction Notice: Multiclass classification of kirlian images using svm technique CS Janadri, BG Sheeparamatti, V Kagawade 2017 International Conference on Advances in Computing, Communications and … , 2017 2017
Retracted: Multiclass classification of kirlian images using svm technique CS Janadri, BG Sheeparamatti, V Kagawade 2017 international conference on advances in computing, communications and … , 2017 2017 Citations: 14
Modeling and analysis of MEMS based acclerometer in Simulink RM Kittali, BG Sheeparamatti, A Sheeparamatti 2017 International Conference On Smart Technologies For Smart Nation … , 2017 2017 Citations: 5
Study of pull-in voltage of a perforated SMA based MEMS Switch SA Huddar, BG Sheeparamatti, AS Bale 2017 International conference on Microelectronic Devices, Circuits and … , 2017 2017 Citations: 31
Sensitivity enhancement in piezoresistive micro-pressure sensor using perforated diaphragm RS Jakati, KB Balavalad, BG Sheeparamatti 2017 2nd IEEE International Conference on Recent Trends in Electronics … , 2017 2017 Citations: 8
Optimum combination and effect analysis of piezoresistor dimensions in micro piezoresistive pressure sensor using design of experiments and ANOVA: a taguchi approach KB Balavalad, BG Sheeparamatti Sensors & Transducers 211 (4), 14-21 , 2017 2017 Citations: 5
Design and simulation of MEMS capacitive pressure sensor array for wide range pressure measurement KB Balavalad, BG Sheeparamatti, VB Math International Journal of Computer Applications 163 (6), 39-46 , 2017 2017 Citations: 18
Modelling and Simulation of Microcantilever based Tuberculosis Detection Sensor P Sajjan, BG Sheeparamatti 3rdInternational Conference on Research Trends in Engineering, Applied … , 2017 2017 Citations: 4
Year of Publication: 2017 KB Balavalad, BG Sheeparamatti, VB Math 2017
A study on reducing the root fillet stress in spur gear using internal stress relieving feature of different shapes MS Hebbal, VB Math, BG Sheeparamatti International Journal of Recent Trends in Engineering 1 (5), 163-165 , 2009 2009 Citations: 35
Study of pull-in voltage of a perforated SMA based MEMS Switch SA Huddar, BG Sheeparamatti, AS Bale 2017 International conference on Microelectronic Devices, Circuits and … , 2017 2017 Citations: 31
Comparative analysis of different micro-pressure sensors using comsol multiphysics RS Jakati, KB Balavalad, BG Sheeparamatti 2016 International Conference on Electrical, Electronics, Communication … , 2016 2016 Citations: 27
Fabrication and characterization of polysilicon-on-insulator (PolySOI) and a-SOI based micro piezoresistive pressure sensor for harsh environment applications BG Sheeparamatti, KB Balavalad Microsystem Technologies 25 (11), 4119-4133 , 2019 2019 Citations: 26
Design simulation and analysis of piezoresistive micro pressure sensor for pressure range of 0 to 1MPa KB Balavalad, BG Sheeparamatti 2016 International Conference on Electrical, Electronics, Communication … , 2016 2016 Citations: 22
Design of piezoresistive pressure sensor for enhanced sensitivity S Bannikoppa, AC Katageri, KB Balavalad, BG Sheeparamatti 2016 International Conference on Energy Efficient Technologies for … , 2016 2016 Citations: 19
Study of effect on resonance frequency of piezoelectric unimorph cantilever for energy harvesting GR Prakash, KMV Swamy, S Huddar, BG Sheeparamatti, K BB sspp 2 (3), 4 , 2012 2012 Citations: 19
Design and simulation of MEMS capacitive pressure sensor array for wide range pressure measurement KB Balavalad, BG Sheeparamatti, VB Math International Journal of Computer Applications 163 (6), 39-46 , 2017 2017 Citations: 18
Study of capacitance in electrostatic comb-drive actuators BG Sheeparamatti, PD Hanasi, V Aibbigeri, N Meti Excerpt from the Proceedings of the COMSOL Conference in Pune , 2015 2015 Citations: 18
Carbon nanotube based piezoresistive pressure sensor for wide range pressure sensing applications-a review AC Katageri, BG Sheeparamatti International Journal of Engineering Research and 4 (08), 27 , 2015 2015 Citations: 17
Simulation of Biosensor using FEM BG Sheeparamatti, MS Hebbal, RB Sheeparamatti, VB Math, ... Journal of physics: conference series 34 (1), 241-246 , 2006 2006 Citations: 17
Research issues in MEMS resonators M Sutagundar, BG Sheeparamatti, DS Jangamshetti Research Inventy: International Journal of Engineering and Science2014 4 (8) , 2014 2014 Citations: 15
Retracted: Multiclass classification of kirlian images using svm technique CS Janadri, BG Sheeparamatti, V Kagawade 2017 international conference on advances in computing, communications and … , 2017 2017 Citations: 14
Artificial neural network modeling of MEMS cantilever resonator using Levenberg Marquardt algorithm M Sutagundar, H Nirosha, BG Sheeparamatti 2016 2nd International Conference on Applied and Theoretical Computing and … , 2016 2016 Citations: 12
Critical analysis of different actuation techniques for a micro cantilever BG Sheeparamatti, P Hanasi, V Abbigeri World Academy of Science, Engineering and Technology International Journal … , 2015 2015 Citations: 12
Simulink model for double buffering RB Sheeparamatti, BG Sheeparamatti, M Bharamagoudar, N Ambali IECON 2006-32nd Annual Conference on IEEE Industrial Electronics, 4593-4597 , 2006 2006 Citations: 11
Design, simulation & analysis of SOI based micro piezoresistive pressure sensor for high temperature applications KB Balavalad, BG Sheeparamatti 2018 3rd IEEE International Conference on Recent Trends in Electronics … , 2018 2018 Citations: 9
Sensitivity enhancement of piezoresistive pressure sensor with meander shape piezoresistor S Meti, KB Balavalad, AC Katageri, BG Sheeparamatti 2016 International Conference on Energy Efficient Technologies for … , 2016 2016 Citations: 9